Statistics
Publications
3
Citations
56
H-Index
3
Active since
1997
Affiliations
Chang-Hasnain C. Chang is an author at Lawrence Berkeley National Laboratory specializing in optics, physics, and natural sciences.
Publications per year
1997–1999
3
3
Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
Patrick Naulleau, Kenneth A. Goldberg, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 21 citations
Natural Sciences, Physics, Metrology +13
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