Anthony Coniglio

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Active since

2002

Affiliations

Advanced Micro Devices (United States)(Current)

Anthony Coniglio is an author at Advanced Micro Devices (United States) specializing in semiconductor devices, extreme ultraviolet lithography, and surface engineering.

Publications per year

2002–2002

Publications

Characterizing post-exposure bake processing for transient- and steady-state conditions in the context of critical dimension control

David A. Steele, Anthony Coniglio, Cherry Tang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 32 citations

Engineering, Materials Engineering, Materials Science +13

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