Concepedia

M. Illig

MI

Statistics

Publications

1

Citations

47

H-Index

1

Active since

1996

Affiliations

Leibniz Institute for High Performance Microelectronics(Current)

M. Illig is an author at Leibniz Institute for High Performance Microelectronics specializing in photolithography, surface tension, and contact angle measurements.

Publications per year

1996–1996

1

Publications

1

Surface tension, adhesion and wetting of materials for photolithographic process

J. Bauer, G. Drescher, M. Illig · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 47 citations

Engineering, Materials Engineering, Materials Science +17

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