Concepedia
Statistics
Publications
2
Citations
60
H-Index
Active since
1980
S. Darack is an author specializing in thin films, nitride thin films, and semiconductor materials.
Publications per year
1980–1983
Fluorine-enhanced plasma growth of native layers on silicon
R. P. H. Chang, C. C. Chang, S. Darack · Applied Physics Letters · 1980 · 46 citations
Natural Sciences, Materials Science, Physics +17
Plasma enhanced beam deposition of thin films at low temperatures
Rui Chang, S. Darack, E. Lane et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +17
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