New capabilities of OBIRCH method for fault localization and defect detection

K. Nikawa, Shoji Inoue

Fault DiagnosisOptical MaterialsEngineeringElectron-beam LithographySilicon On Insulator +23

Failure analysis case studies using the IR-OBIRCH (infrared optical beam induced resistance change) method

K. Nikawa, Shoji Inoue, K. Morimoto, +1

EngineeringReliability EngineeringResistance ChangeOptical PropertiesOptical Diagnostics +15

Noncontact inspection technique for electrical failures in semiconductor devices using a laser terahertz emission microscope

Masatsugu Yamashita, Chiko Otani, Kodo Kawase, +2

Applied Physics Letters

Semiconductor DevicesElectrical EngineeringNormal ChipTerahertz SpectroscopyEngineering +13

New applications of focused ion beam technique to failure analysis and process monitoring of VLSI

K. Nikawa, K. Nasu, Masaki Murase, +3

Cross SectionEngineeringNew ApplicationsStructural MaterialsIon Implantation +15

Novel Method for Defect Detection in Al Stripes by Means of Laser Beam Heating and Detection of Changes in Electrical Resistance

K. Nikawa, Chika Matsumoto, Shoji Inoue

Japanese Journal of Applied Physics

Electrical ResistanceOptical MaterialsEngineeringMicroscopyLaser Applications +19

Backside observation of large-scale integrated circuits with multilayered interconnections using laser terahertz emission microscope

Masatsugu Yamashita, Chiko Otani, Kodo Kawase, +5

Applied Physics Letters

Thz PhotonicsLarge-scale Integrated CircuitsEngineeringMicroscopyMultilayered Interconnections +21

THz emission characteristics from p/n junctions with metal lines under non-bias conditions for LSI failure analysis

Masatsugu Yamashita, Chiko Otani, Toru Matsumoto, +7

Optics Express

Thz PhotonicsEngineeringMetallic LinesMetal LinesTerahertz Photonics +17

Laser terahertz emission microscope for inspecting electrical failures in integrated circuits

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, +3

Local Electric FieldEngineeringMicroscopyIntegrated CircuitsTerahertz Photonics +15

Imaging of current paths and defects in Al and TiSi interconnects on very-large-scale integrated-circuit chips using near-field optical-probe stimulation and resulting resistance change

K. Nikawa, Takanao Saiki, Shoji Inoue, +1

Applied Physics Letters

Optical MaterialsEngineeringOptical TestingLaser ApplicationsOptical Metrology +26

Recent Topics in High-T_c Superconductive Electronics

Masayoshi Tonouchi, Akira Fujimaki, K. Tanabe, +3

Japanese Journal of Applied Physics

Superconducting MaterialElectrical EngineeringHigh-tc SuperconductivityEngineeringPhysics +10