Shih‐Hui Jen

Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

Shih‐Hui Jen, Jacob A. Bertrand, Steven M. George · Journal of Applied Physics · 2011 · 210 citations

Aluminium Nitride, Engineering, Severe Plastic Deformation +19

The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates

David C. Miller, Ross R. Foster, Yadong Zhang et al. · Journal of Applied Physics · 2009 · 110 citations

Engineering, Spacer Layer, Mechanical Engineering +24

Thermo-mechanical properties of alumina films created using the atomic layer deposition technique

David C. Miller, Ross R. Foster, Shih‐Hui Jen et al. · Sensors and Actuators A Physical · 2010 · 96 citations

Materials Science, Aluminium Nitride, Engineering +8

Alucone Interlayers to Minimize Stress Caused by Thermal Expansion Mismatch between Al₂O₃ Films and Teflon Substrates

Shih‐Hui Jen, Steven M. George, R. Scott McLean et al. · ACS Applied Materials & Interfaces · 2012 · 60 citations

Aluminium Nitride, Engineering, Ethylene Propylene +17

Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition

Shih‐Hui Jen, Byoung H. Lee, Steven M. George et al. · Applied Physics Letters · 2012 · 50 citations

Engineering, Mld Cycles, Surface Nanotechnology +16