Concepedia

Marco Doms

MD

Statistics

Publications

4

Citations

132

H-Index

4

Active since

2004

Affiliations

Hamburg University of Technology(Current)

Marco Doms is an author at Hamburg University of Technology specializing in microfabrication, engineering, and microelectromechanical systems.

Publications per year

2004–2008

4

Publications

4

A microfabricated Pirani pressure sensor operating near atmospheric pressure

Marco Doms, Andre Bekesch, Joerg Mueller · Journal of Micromechanics and Microengineering · 2005 · 58 citations

Engineering, Materials Engineering, Materials Science +17

A micromachined vapor jet pump

Marco Doms, J. Mueller · Sensors and Actuators A Physical · 2004 · 33 citations

Engineering, Mechanical Engineering, Microfabrication +5

Hydrophobic coatings for MEMS applications

Marco Doms, Holger Feindt, Winfred Kuipers et al. · Journal of Micromechanics and Microengineering · 2008 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +14

Design, Fabrication, and Characterization of a Micro Vapor-Jet Vacuum Pump

Marco Doms, Jörg Müller · Journal of Fluids Engineering · 2007 · 10 citations

Engineering, Chemistry, Mechanical Engineering +16

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