Concepedia

Yoshihide Kihara

YK

Statistics

Publications

8

Citations

293

H-Index

8

Active since

1998

Affiliations

Tokyo Electron (Japan)(Current)

University of Yamanashi

Miyagi University

Nagoya University

Yoshihide Kihara is an author at Tokyo Electron (Japan) specializing in materials science, natural sciences, and materials engineering.

Publications per year

1998–2025

8

Publications

8

Gas‐Grain Processes for the Formation of CH<sub>4</sub>and H<sub>2</sub>O: Reactions of H Atoms with C, O, and CO in the Solid Phase at 12 K

Kenzo Hiraoka, Takashi Miyagoshi, Toshikazu Takayama et al. · The Astrophysical Journal · 1998 · 124 citations

Natural Sciences, Chemistry, Chemical Kinetics +8

Benefits of atomic-level processing by quasi-ALE and ALD technique

Masashi Honda, Takayuki Katsunuma, Masahiro Tabata et al. · Journal of Physics D Applied Physics · 2017 · 42 citations

Engineering, Materials Engineering, Materials Science +17

Pseudo‐Wet Plasma Mechanism Enabling High‐Throughput Dry Etching of SiO <sub>2</sub> by Cryogenic‐Assisted Surface Reactions

Shih‐Nan Hsiao, Makoto Sekine, Nikolay Britun et al. · Small Methods · 2024 · 33 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Beyond 10 μm Depth Ultra-High Speed Etch Process with 84% Lower Carbon Footprint for Memory Channel Hole of 3D NAND Flash over 400 Layers

Yoshihide Kihara, Maju Tomura, Wataru Sakamoto et al. · 2023 · 30 citations

Engineering, Manufacturing Engineering, Materials Science +15

Reaction of H Atoms with Solid C<sub>2</sub>H<sub>4</sub>and C<sub>2</sub>H<sub>6</sub>at 13 K

Kenzo Hiraoka, Kazuyosi Yamamoto, Yoshihide Kihara et al. · The Astrophysical Journal · 1999 · 20 citations · Full text

Natural Sciences, Chemistry, Materials Science +13

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