Concepedia

Makoto Sekine

MS

Statistics

Publications

5

Citations

90

H-Index

5

Active since

1991

Affiliations

Nagoya University(Current)

Tokyo Electron (Japan)

Miyagi University

Makoto Sekine is an author at Nagoya University specializing in materials engineering, materials science, and natural sciences.

Publications per year

1991–2025

5

Publications

5

Pseudo‐Wet Plasma Mechanism Enabling High‐Throughput Dry Etching of SiO <sub>2</sub> by Cryogenic‐Assisted Surface Reactions

Shih‐Nan Hsiao, Makoto Sekine, Nikolay Britun et al. · Small Methods · 2024 · 33 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Auger valence electron spectroscopy of a structural phase transformation in metastable alpha-Sn grown on InSb (001)

Kazuyuki Ueda, Hiroshi Nakayama, Makoto Sekine et al. · Vacuum · 1991 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +13

<i>In Situ</i> Monitoring Surface Reactions in Cryogenic Atomic Layer Etching of Silicon Nitride by Alternating Surface Modification with Hydrogen Fluoride Dose and Ar Plasmas

Shih‐Nan Hsiao, Makoto Sekine, Yuki Iijima et al. · Chemistry of Materials · 2024 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

Origin Analyses of Obtuse Triangular Defects in 4deg.-Off 4H-SiC Epitaxial Wafers by Electron Microscopy and by Synchrotron X-Ray Topography

Takako Yamashita, H. Matsuhata, Yoshihiko Miyasaka et al. · Materials science forum · 2013 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Revolutionizing reactive ion etching: ion-enhanced surface autocatalytic reactions enabling ultra-high throughput using cryogenic hydrogen-fluoride plasma

Shih‐Nan Hsiao, Yusuke Imai, Makoto Sekine et al. · Chemical Engineering Journal · 2025 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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