Richard H. Perkins

Publications

Citations

H-Index

1995

Active since

Affiliations

North Carolina State University(Current)

Richard H. Perkins is an author at North Carolina State University specializing in mechanics of materials, numerical simulation, and thermal engineering.

Top concepts

EngineeringHeat TransferThermodynamicsMicroelectronicsThermal ModelingThermal ProcessesThermal ManagementIntegrated CircuitsThermal EngineeringNumerical Simulation

Publications per year

1995–1995

Publications

Thermal uniformity and stress minimization during rapid thermal processes

Richard H. Perkins, Terrence J. Riley, R.S. Gyurcsik · IEEE Transactions on Semiconductor Manufacturing · 1995 · 26 citations

Engineering, Thermal Uniformity, Integrated Circuits +17

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