Statistics
Publications
2
Citations
90
H-Index
2
Active since
2001
Affiliations
Bernd Tollkuehn is an author at Fraunhofer Institute for Integrated Systems and Device Technology specializing in resolution enhancement, manufacturing engineering, and electronic materials.
Publications per year
2001–2004
2
2
Toward automatic mask and source optimization for optical lithography
Andreas Erdmann, Tim Fuehner, Thomas Schnattinger et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 60 citations
Engineering, Manufacturing Engineering, Additive Manufacturing +14
Comparison of simulation approaches for chemically amplified resists
Andreas Erdmann, Wolfgang Henke, Stewart A. Robertson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 30 citations
Natural Sciences, Materials Engineering, Materials Science +13
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