Statistics
Publications
3
Citations
143
H-Index
3
Active since
2008
Affiliations
Delft University of Technology(Current)
Anja van Langen–Suurling is an author at Delft University of Technology specializing in microscopy, applied physics, and microelectronics.
Publications per year
2008–2014
3
3
Evaluation of EUV resist performance below 20nm CD using helium ion lithography
Diederik Maas, Emile van Veldhoven, Anja van Langen–Suurling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 14 citations
Helium Ion Lithography, Euv Resist Performance, Engineering +19
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