P. Leonov

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Publications

Citations

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Active since

1990

Affiliations

Naval Research Laboratory Electronics Science and Technology Division(Current)

United States Naval Research Laboratory

P. Leonov is an author at Naval Research Laboratory Electronics Science and Technology Division specializing in engineering, electronic materials, and semiconductor devices.

Publications per year

1990–1990

Publications

A Si0.7Ge0.3 strained-layer etch stop for the generation of thin layer undoped silicon

D. J. Godbey, H.L. Hughes, Francis J. Kub et al. · Applied Physics Letters · 1990 · 19 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of Bond and Etch‐Back Silicon on Insulator Using a Strained Si0.7Ge0.3 Layer as an Etch Stop

D. J. Godbey, M. E. Twigg, H.L. Hughes et al. · Journal of The Electrochemical Society · 1990 · 17 citations

Engineering, Materials Engineering, Materials Science +17

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