Concepedia

Fangyu Wu

FW

7

Publications

149

Citations

7

H-Index

2010

Active since

Affiliations

Georgia Institute of Technology(Current)

China University of Mining and Technology

State Key Laboratory of Chemical Engineering

Tsinghua University

Fangyu Wu is an author at Georgia Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceThin FilmsMicroelectronicsNanomanufacturingHydrogenMicrofabricationChemical Engineering

Publications per year

2010–2023

7

Publications

7

Low-Temperature Etching of Cu by Hydrogen-Based Plasmas

Fangyu Wu, Galit Levitin, Dennis W. Hess · ACS Applied Materials & Interfaces · 2010 · 42 citations

Materials Science, Cu Thin Films, Chemical Engineering +14

Mechanistic considerations of low temperature hydrogen-based plasma etching of Cu

Fangyu Wu, Galit Levitin, Dennis W. Hess · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 22 citations

Engineering, Subtractive Etching, Vacuum Device +19

Patterning of Cu Films by a Two-Step Plasma Etching Process at Low Temperature

Fangyu Wu, Galit Levitin, Dennis W. Hess · Journal of The Electrochemical Society · 2010 · 20 citations

Cu Films, Engineering, Cu Pattern Fidelity +18

Temperature Effects and Optical Emission Spectroscopy Studies of Hydrogen-Based Plasma Etching of Copper

Fangyu Wu, Galit Levitin, Dennis W. Hess · Journal of The Electrochemical Society · 2011 · 20 citations

Engineering, Optical Emission Spectroscopy, Vacuum Device +16

A Novel Green Diluent for the Preparation of Poly(4-methyl-1-pentene) Membranes via a Thermally-Induced Phase Separation Method

Yuanhui Tang, Mufei Li, Yakai Lin et al. · Membranes · 2021 · 19 citations · Full text

Rows per page

1–5 of 7