Hideyuki Kitoh Hideyuki Kitoh

Publications

Citations

H-Index

1996

Active since

Affiliations

Naval Research Laboratory Information Technology Division(Current)

Hideyuki Kitoh Hideyuki Kitoh is an author at Naval Research Laboratory Information Technology Division specializing in applied physics, engineering, and electrical insulation.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical InsulationElectrical Engineering

Publications per year

1996–1996

Publications

Formation of SiOF Films by Plasma-Enhanced Chemical Vapor Deposition Using (C2H5O)3SiF

Hideyuki Kitoh Hideyuki Kitoh, Masakazu Muroyama, Masayoshi Sasaki et al. · Japanese Journal of Applied Physics · 1996 · 39 citations

Materials Science, Fluorine Stability, Electrical Engineering +13

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