Concepedia

S. Zhang

SZ

1

Publications

55

Citations

1

H-Index

2002

Active since

Affiliations

Foundry (United Kingdom)(Current)

S. Zhang is an author at Foundry (United Kingdom) specializing in applied physics, microelectronics, and engineering.

Top concepts

PhysicsEngineeringMicrostructureApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsCrystalline Defects

Publications per year

2002–2002

1

Publications

1

Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures

Jaap van den Berg, D.G. Armour, S. Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 55 citations · Full text

Ultrashallow B, Engineering, Silicon On Insulator +17

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