Concepedia
Author
Osamu Jintsugawa
Also Known As
4
Publications
27
Citations
1
H-Index
0
Concepts
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26
Thermal nitridation of ultrathin SiO <sub>2</sub> on Si by NH <sub>3</sub>
Osamu Jintsugawa, Masao Sakuraba, Takashi Matsuura, +1
Surface and Interface Analysis
2002
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