A. Li-Fatou

Effect of N incorporation on boron penetration from p+ polycrystalline-Si through HfSixOy films

Manuel Quevedo-López, M. El-Bouanani, M. J. Kim et al. · Applied Physics Letters · 2003 · 60 citations

Engineering, Materials Engineering, Materials Science +17

Boron penetration studies from p+ polycrystalline Si through HfSixOy

Manuel Quevedo-López, M. El-Bouanani, M. J. Kim et al. · Applied Physics Letters · 2002 · 47 citations

Engineering, Materials Engineering, Materials Science +17

Dopant penetration studies through Hf silicate

Manuel Quevedo-López, M. R. Visokay, J. J. Chambers et al. · Journal of Applied Physics · 2005 · 38 citations

Engineering, Materials Engineering, Materials Science +17

Phosphorus and arsenic penetration studies through HfSixOy and HfSixOyNz films

Manuel Quevedo-López, M. El-Bouanani, M. J. Kim et al. · Applied Physics Letters · 2002 · 35 citations

Engineering, Materials Engineering, Materials Science +17

Interfacial oxygen and nitrogen induced dipole formation and vacancy passivation for increased effective work functions in TiN/HfO2 gate stacks

Christopher L. Hinkle, Rohit Galatage, R. A. Chapman et al. · Applied Physics Letters · 2010 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +17