Concepedia

H.W. Su

HS

Statistics

Publications

2

Citations

22

H-Index

2

Active since

2004

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

H.W. Su is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in electronic packaging, computer engineering, and materials engineering.

Top concepts

Publications per year

2004–2005

2

Publications

2

High performance/reliability Cu interconnect with selective CoWP cap

T. Ko, Chih-Sheng Chang, S.W. Chou et al. · 2004 · 12 citations

, , +16

Direct plating of Cu on ALD TaN for 45nm-node Cu BEOL metallization

Chun-Hsing Shih, H.W. Su, C.J. Lin et al. · 2005 · 10 citations

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