Statistics
Publications
1
Citations
22
H-Index
1
Active since
2001
Affiliations
IBM (United States)(Current)
K. Rex Chen is an author at IBM (United States) specializing in polymer thin films, materials engineering, and shrinkage reduction.
Publications per year
2001–2001
1
1
Investigation on the mechanism of the 193-nm resist linewidth reduction during the SEM measurement
ChungHsi J. Wu, Wu‐Song Huang, K. Rex Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +17
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