Statistics
Publications
1
Citations
14
H-Index
1
Active since
1996
Affiliations
Hitachi (Japan)(Current)
Hideyuki Sakiyama is an author at Hitachi (Japan) specializing in microelectronics, etching, and plasma etching.
Publications per year
1996–1996
1
1
Tungsten Gate Technology for Quarter-Micron Application
H. Noda, Hideyuki Sakiyama, Yasushi Goto et al. · Japanese Journal of Applied Physics · 1996 · 14 citations
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