Concepedia

Scott Bushman

SB

3

Publications

98

Citations

3

H-Index

1995

Active since

Affiliations

The University of Texas at Austin(Current)

Electrochemical Society

Texas Instruments (United States)

Scott Bushman is an author at The University of Texas at Austin specializing in engineering, microelectronics, and business.

Top concepts

Publications per year

1995–1997

3

Publications

3

Modeling and control of microelectronics materials processing

Thomas A. Badgwell, T. Breedijk, Scott Bushman et al. · Computers & Chemical Engineering · 1995 · 47 citations

, , +3

Modeling of Plasma Etch Systems Using Ordinary Least Squares, Recurrent Neural Network, and Projection to Latent Structure Models

Scott Bushman, Thomas F. Edgar, Isaac Trachtenberg · Journal of The Electrochemical Society · 1997 · 26 citations

, , +14

Radio Frequency Diagnostics for Plasma Etch Systems

Scott Bushman, Thomas F. Edgar, Isaac Trachtenberg · Journal of The Electrochemical Society · 1997 · 25 citations

, , +14

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