Concepedia

Norihiro Agawa

NA

2

Publications

58

Citations

2

H-Index

1999

Active since

Affiliations

Ritsumeikan University(Current)

Norihiro Agawa is an author at Ritsumeikan University specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

Publications per year

1999–2000

2

Publications

2

Moving mask LIGA (M/sup 2/LIGA) process for control of side wall inclination

Osamu Tabata, Koichi Terasoma, Norihiro Agawa et al. · 1999 · 43 citations

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3-Dimensional Microstructure Fabrication using Multiple Moving Mask Deep X-ray Lithography Process

Osamu Tabata, Kouichi Terasoma, Norihiro Agawa et al. · IEEJ Transactions on Sensors and Micromachines · 2000 · 15 citations · Full text

, , +17

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