Concepedia

D. Benzeggouta

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Statistics

Publications

4

Citations

85

H-Index

4

Active since

2009

Affiliations

Université Paris-Sud(Current)

Laboratoire de Physique des Gaz et des Plasmas

Centre National de la Recherche Scientifique

D. Benzeggouta is an author at Université Paris-Sud specializing in materials science, surface science, and plasma physics.

Publications per year

2009–2013

4

Publications

4

Study of a HPPMS discharge in Ar/O<sub>2</sub>mixture: I. Discharge characteristics with Ru cathode

D. Benzeggouta, M. C. Hugon, J. Bretagne et al. · Plasma Sources Science and Technology · 2009 · 31 citations

, , +13

Quantitative damage depth profiles in arsenic implanted HgCdTe

Clément Lobre, D. Jalabert, I. Vickridge et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2013 · 23 citations

, , +4

Study of a HPPMS discharge in Ar/O<sub>2</sub>mixture: II. Plasma optical emission and deposited RuO<sub><i>x</i></sub>film properties

D. Benzeggouta, M. C. Hugon, J. Bretagne · Plasma Sources Science and Technology · 2009 · 21 citations

, , +15

Investigation of BST thin films deposited by RF magnetron sputtering in pure Argon

Fatiha Challali, Marie‐Paule Besland, D. Benzeggouta et al. · Thin Solid Films · 2009 · 10 citations

, , +12

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