Thierry Berthou

Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

Ainara Rodríguez, Mikel Echeverría, Miguel Ellman et al. · Microelectronic Engineering · 2008 · 118 citations

Engineering, Materials Engineering, Materials Science +16

High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

Miguel Ellman, Ainara Rodríguez, N. Pérez et al. · Applied Surface Science · 2008 · 43 citations

Engineering, Materials Engineering, Optical Materials +12

Ordered nanostructures written directly by laser interference

Chunlei Tan, Changsi Peng, Janne Pakarinen et al. · Nanotechnology · 2009 · 26 citations

Engineering, Electrical Engineering, Materials Science +13

Line defects in two-dimensional four-beam interference patterns

Chunlei Tan, Changsi Peng, V N Petryakov et al. · New Journal of Physics · 2008 · 19 citations · Full text

Natural Sciences, Electrical Engineering, Physics +14

Laser interference nanolithography

Z. Wang, J. Zhang, Ze Ji et al. · 2008 · 10 citations

Engineering, Materials Engineering, Materials Science +17