Concepedia

S.T. Chen

SC

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Publications

1

Citations

83

H-Index

1

Active since

1999

Affiliations

Feng Chia University(Current)

S.T. Chen is an author at Feng Chia University specializing in metal thin films, phase formation, and semiconductor device materials.

Publications per year

1999–1999

1

Publications

1

Phase formation behavior and diffusion barrier property of reactively sputtered tantalum-based thin films used in semiconductor metallization

G.S. Chen, P.Y. Lee, S.T. Chen · Thin Solid Films · 1999 · 83 citations

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