Statistics
Publications
5
Citations
98
H-Index
5
Active since
1985
Affiliations
Eindhoven University of Technology(Current)
H. A. J. Senhorst is an author at Eindhoven University of Technology specializing in applied physics, physics, and engineering.
Publications per year
1985–1994
5
5
Dynamics of ion-assisted etching in the Si(100)/XeF2/Ar+ system on a time scale 100 μs–1000 s
G. J. P. Joosten, M. J. M. Vugts, H. J. Spruijt et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 13 citations
Ion-assisted Etching, Engineering, Ion Beam Instrumentation +19
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