Concepedia

Yoshihisa Ooae

YO

2

Publications

67

Citations

2

H-Index

1993

Active since

Affiliations

Fujitsu (Japan)(Current)

Yoshihisa Ooae is an author at Fujitsu (Japan) specializing in applied physics, microelectronics, and microscopy.

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Publications per year

1993–1996

2

Publications

2

Multielectron beam blanking aperture array system SYNAPSE-2000

Hiroshi Yasuda, Soichiro Arai, Jun-ichi Kai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 38 citations

, , +21

Fast Electron Beam Lithography System with 1024 Beams Individually Controlled by Blanking Aperture Array

Hiroshi Yasuda, Soichiro Arai, Jun-ichi Kai et al. · Japanese Journal of Applied Physics · 1993 · 29 citations

, , +15

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