Concepedia

Mineo Takaoka

MT

Statistics

Publications

3

Citations

46

H-Index

3

Active since

2005

Affiliations

University of Arizona(Current)

Mineo Takaoka is an author at University of Arizona specializing in engineering, materials engineering, and surface engineering.

Publications per year

2005–2009

3

Publications

3

Pad flattening ratio, coefficient of friction and removal rate analysis during silicon dioxide chemical mechanical planarization

H. Lee, Yong Zhuang, Masano Sugiyama et al. · Thin Solid Films · 2009 · 24 citations

, , +14

Investigation of high-pressure micro jet technology as an alternative to diamond disc conditioning in ILD CMP

Darren DeNardis, Yoshiyuki Seike, Mineo Takaoka et al. · Wear · 2005 · 12 citations

, , +3

Development of a Pad Conditioning Process for Interlayer Dielectric CMP Using High-Pressure Micro Jet Technology

Yoshiyuki Seike, Hyo-sang Lee, Mineo Takaoka et al. · Journal of The Electrochemical Society · 2006 · 10 citations

, , +16

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