Michael Breeden

Selective Chemical Response of Transition Metal Dichalcogenides and Metal Dichalcogenides in Ambient Conditions

Jun Hong Park, Suresh Vishwanath, Steven Wolf et al. · ACS Applied Materials & Interfaces · 2017 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

Proximity Effects of the Selective Atomic Layer Deposition of Cobalt on the Nanoscale: Implications for Interconnects

Michael Breeden, Victor Wang, Jacob Spiegelman et al. · ACS Applied Nano Materials · 2021 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17

Cu–Cu Bonding Using Selective Cobalt Atomic Layer Deposition for 2.5-D/3-D Chip Integration Technologies

Ming-Jui Li, Michael Breeden, Victor Wang et al. · IEEE Transactions on Components Packaging and Manufacturing Technology · 2020 · 17 citations

Engineering, Materials Engineering, Materials Science +17

Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4

Steven Wolf, Michael Breeden, Iljo Kwak et al. · Applied Surface Science · 2018 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +10

Al2O3/Si0.7Ge0.3(001) & HfO2/Si0.7Ge0.3(001) interface trap state reduction via in-situ N2/H2 RF downstream plasma passivation

Michael Breeden, Steven Wolf, Scott T. Ueda et al. · Applied Surface Science · 2019 · 13 citations

Natural Sciences, Materials Science, Physics +12