3
Publications
73
Citations
3
H-Index
1995
Active since
Affiliations
Applied Materials (United States)(Current)
Liang-Yuh Chen is an author at Applied Materials (United States) specializing in engineering, materials science, and surface science.
Top concepts
EngineeringMaterial ScienceCorrosionSurface ScienceChemistryMicrostructureApplied PhysicsNanoengineeringNanofabricationMicroelectronics
Publications per year
1995–2000
3
3
Adhesion studies of CVD copper metallization
Srinivas Gandikota, Steve Voss, Rong Tao et al. · Microelectronic Engineering · 2000 · 41 citations
Fabrication of integrated micromachined electron guns
Wolfgang Hofmann, Liang-Yuh Chen, Noel C. MacDonald · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 14 citations
Engineering, Electron-beam Lithography, Optoelectronic Devices +18
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