Concepedia

Dietmar Gleispach

DG

Statistics

Publications

4

Citations

76

H-Index

4

Active since

2011

Affiliations

AMS (Austria)(Current)

Mines Saint-Étienne

Dietmar Gleispach is an author at AMS (Austria) specializing in engineering, industrial engineering, and computer engineering.

Top concepts

Publications per year

2011–2016

4

Publications

4

Virtual Metrology Modeling for CVD Film Thickness

Jérôme Besnard, Dietmar Gleispach, Hervé Gris et al. · International Journal of Control Science and Engineering · 2012 · 28 citations · Full text

, , +18

A Methodology for Predictive Maintenance in Semiconductor Manufacturing

Peter Scheibelhofer, Dietmar Gleispach, Günter Hayderer et al. · Austrian Journal of Statistics · 2016 · 21 citations · Full text

, , +19

Tool Condition Diagnosis With a Recipe-Independent Hierarchical Monitoring Scheme

Jakey Blue, Dietmar Gleispach, Agnès Roussy et al. · IEEE Transactions on Semiconductor Manufacturing · 2012 · 17 citations

, , +20

Virtual metrology models for predicting avera PECVD oxide film thickne

Ariane Ferreira Porto Rosa, Agnès Roussy, Christelle Kernaflen et al. · 2011 · 10 citations

, , +12

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