Concepedia
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Publications
1
Citations
37
H-Index
Active since
1979
A. Frichet is an author specializing in mask alignment, optical alignment, and natural sciences.
Publications per year
1979–1979
Optical alignment system for submicron x-ray lithography
B. Fay, J. Trotel, A. Frichet · Journal of Vacuum Science and Technology · 1979 · 37 citations
Natural Sciences, Manufacturing Engineering, Physics +14
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