Concepedia
Statistics
Publications
5
Citations
181
H-Index
Active since
1987
Affiliations
Tohoku University(Current)
Saitama University
Osaka Electro-Communication University
Seiko Holdings (Japan)
Sumitomo Electric Industries (United States)
Mutsuo Yamashita is an author at Tohoku University specializing in natural sciences, materials science, and thin films.
Publications per year
1987–2003
Fundamental characteristics of built-in high-frequency coil-type sputtering apparatus
Mutsuo Yamashita · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 83 citations
Natural Sciences, Materials Science, Physics +13
Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition
Jae‐Won Lim, Yukio Ishikawa, Kiyoshi Miyake et al. · MATERIALS TRANSACTIONS · 2002 · 41 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +14
Sputter Type HF Ion Source for Ion Beam Deposition Apparatus
Mutsuo Yamashita · Japanese Journal of Applied Physics · 1987 · 22 citations
Natural Sciences, Electrical Engineering, Physics +17
Effect of Substrate Bias Voltage on the Thermal Stability of Cu/Ta/Si Structures Deposited by Ion Beam Deposition
Jae‐Won Lim, Kouji Mimura, Kiyoshi Miyake et al. · Japanese Journal of Applied Physics · 2003 · 21 citations
Natural Sciences, Materials Engineering, Materials Science +15
Improvement of Ta Barrier Film Properties in Cu Interconnection by Using a Non-mass Separated Ion Beam Deposition Method
Jae‐Won Lim, Yukio Ishikawa, Kiyoshi Miyake et al. · MATERIALS TRANSACTIONS · 2002 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +17
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