Concepedia
1
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11
Citations
H-Index
2019
Active since
Affiliations
Karlsruhe Institute of Technology(Current)
Thomas Beckenbach is an author at Karlsruhe Institute of Technology.
Publications per year
2019–2019
Influence of secondary effects in the fabrication of submicron resist structures using deep x-ray lithography
Faisal Abrar, Thomas Beckenbach, Jürgen Mohr et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2019 · 11 citations · Full text
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