Concepedia

Y. Wang

YW

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Publications

1

Citations

12

H-Index

1

Active since

1996

Affiliations

University of North Carolina at Chapel Hill(Current)

Y. Wang is an author at University of North Carolina at Chapel Hill specializing in applied physics, engineering, and electrical engineering.

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Publications per year

1996–1996

1

Publications

1

<i>In</i> <i>situ</i> investigation of the passivation of Si and Ge by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiO2

Y. Wang, Y. Z. Hu, E. A. Irene · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 12 citations

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