Haifei Bao

Statistics

Publications

Citations

316

H-Index

Active since

2002

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

State Key Laboratory of Transducer Technology

Chinese Academy of Sciences

Haifei Bao is an author at Shanghai Institute of Microsystem and Information Technology specializing in engineering, microfabrication, and electrical engineering.

Top concepts

EngineeringMicrofabricationElectrical EngineeringNanotechnologyApplied PhysicsInstrumentationMaterial ScienceMicroelectronicsIntegrated CircuitsMechanical Engineering

Publications per year

2002–2019

Publications

Friction and wear properties in MEMS

Weiyuan Wang, Yuelin Wang, Haifei Bao et al. · Sensors and Actuators A Physical · 2002 · 93 citations

Materials Science, Engineering, Microfabrication +7

High-performance monolithic triaxial piezoresistive shock accelerometers

Peitao Dong, Xinxin Li, Heng Yang et al. · Sensors and Actuators A Physical · 2007 · 55 citations

Engineering, Mechanical Engineering, Accelerometer +4

A silicon integrated micro nano-positioning<i>XY</i>-stage for nano-manipulation

Lining Sun, Jiachou Wang, Weibin Rong et al. · Journal of Micromechanics and Microengineering · 2008 · 51 citations

Engineering, Nanodevices, Integrated Circuits +18

Single-wafer-processed nano-positioning XY-stages with trench-sidewall micromachining technology

Lei Gu, Xinxin Li, Haifei Bao et al. · Journal of Micromechanics and Microengineering · 2006 · 36 citations

Electrical Engineering, Trench-sidewall Micromachining Technology, Engineering +13

AFM probes fabricated with masked–maskless combined anisotropic etching and p<sup>+</sup>surface doping

Jianqiang Han, Xinxin Li, Haifei Bao et al. · Journal of Micromechanics and Microengineering · 2005 · 23 citations

Afm Probes, Engineering, Electron-beam Lithography +16

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