Shankar Dutta

Structural characterization of polycrystalline thin films by X-ray diffraction techniques

Akhilesh Pandey, Sandeep Dalal, Shankar Dutta et al. · Journal of Materials Science Materials in Electronics · 2021 · 192 citations

X-ray Crystallography, Materials Science, X-ray Spectroscopy +8

Comparison of etch characteristics of KOH, TMAH and EDP for bulk micromachining of silicon (110)

Shankar Dutta, Md Imran, Prem Kumar et al. · Microsystem Technologies · 2011 · 61 citations

Electrical Engineering, Engineering, Micromachines +7

Overview of residual stress in MEMS structures: Its origin, measurement, and control

Shankar Dutta, Akhilesh Pandey · Journal of Materials Science Materials in Electronics · 2021 · 53 citations

Engineering, Mechanical Behavior, Mechanics +8

Improved electrical properties of PbZrTiO3/BiFeO3 multilayers with ZnO buffer layer

Shankar Dutta, Akhilesh Pandey, I. Yadav et al. · Journal of Applied Physics · 2012 · 42 citations

Engineering, Thin Film Process Technology, Perovskite Module +16

Growth and evolution of residual stress of AlN films on silicon (100) wafer

Akhilesh Pandey, Shankar Dutta, Ravi Prakash et al. · Materials Science in Semiconductor Processing · 2016 · 41 citations

Materials Engineering, Aln Films, Materials Science +8