Concepedia

L Chen

LC

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Publications

1

Citations

18

H-Index

1

Active since

2002

Affiliations

New Jersey Institute of Technology(Current)

L Chen is an author at New Jersey Institute of Technology specializing in precursor design, surface science, and chemical vapor deposition precursors.

Publications per year

2002–2002

1

Publications

1

A comparative study of plasma enhanced chemically vapor deposited SiOH and SiNCH films using the environmentally benign precursor diethylsilane

R. Lévy, L Chen, J. M. Grow et al. · Materials Letters · 2002 · 18 citations

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