Statistics
Publications
7
Citations
220
H-Index
7
Active since
1986
Affiliations
ShinEtsu Chemical (Japan)(Current)
Y. Kitagawara is an author at ShinEtsu Chemical (Japan) specializing in applied physics, engineering, and materials science.
Publications per year
1986–2000
7
7
M. Iwabuchi, Koichi Mizushima, Masaya Mizuno et al. · Journal of The Electrochemical Society · 2000 · 17 citations · Full text
Engineering, Substrate Particle Contamination, Si Epitaxial Wafer +19
Y. Kitagawara, T. Yoshida, T. Hamaguchi et al. · Journal of The Electrochemical Society · 1995 · 16 citations
Materials Science, Semiconductors, Semiconductor Technology +14
Rows per page
1–5 of 7