Patricia M. Lindley

Comparison of submicron particle analysis by Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and secondary electron microscopy with energy dispersive x-ray spectroscopy

Kenton D. Childs, D. H. Narum, Lori A. LaVanier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +17

Analysis of organic contamination in semiconductor processing

Patrick J. Smith, Patricia M. Lindley · 1998 · 15 citations

Natural Sciences, Chemistry, Organic Chemistry +15

Determination of trace metallic impurities on 200-mm silicon wafers by time-of-flight secondary-ion-mass spectroscopy

Paul K. Chu, B. Schueler, Fraser Reich et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fused‐<i>s</i>‐triazino heterocycles <b>IX</b>. 1,3,4,6,9b‐pentaazaphenalenes and 1,3,6,9b‐tetraazaphenalenes: Amino and alkoxy derivatives

John T. Shaw, Timothy W. Coffindaffer, Julie B. Stimmel et al. · Journal of Heterocyclic Chemistry · 1982 · 13 citations

Natural Sciences, Chemistry, Medicinal Chemistry +12

Effect of Acetate Distribution on Surface Segregation in Poly(vinyl alcohol-<i>co</i>-vinyl acetate) Copolymer Films

Martin A. Helfand, John B. Mazzanti, Matilda Fone et al. · Langmuir · 1996 · 13 citations

Natural Sciences, Chemistry, Materials Science +17