C. Küllig

A novel approach for negative ion analysis using 160 GHz microwave interferometry and laser photodetachment in oxygen cc-rf plasmas

C. Küllig, K. Dittmann, Jürgen Meichsner · Plasma Sources Science and Technology · 2010 · 41 citations

Engineering, Novel Approach, Plasma Science +19

On the E-H transition in inductively coupled radio frequency oxygen plasmas: I. Density and temperature of electrons, ground state and singlet metastable molecular oxygen

T. Wegner, C. Küllig, Jürgen Meichsner · Plasma Sources Science and Technology · 2017 · 41 citations · Full text

Engineering, Glow Discharge, Plasma Science +19

160 GHz Gaussian beam microwave interferometry in low-density rf plasmas

K. Dittmann, C. Küllig, Jürgen Meichsner · Plasma Sources Science and Technology · 2012 · 40 citations

Electron Density, Electrical Engineering, Plasma Electronics +14

Dynamics and Electronegativity of Oxygen RF Plasmas

C. Küllig, K. Dittmann, T. Wegner et al. · Contributions to Plasma Physics · 2012 · 38 citations

Electron heating during E-H transition in inductively coupled RF plasmas

T. Wegner, C. Küllig, Jürgen Meichsner · Plasma Sources Science and Technology · 2015 · 27 citations

Excitation Rate Patterns, Engineering, Glow Discharge +19