Concepedia

M. J. van Bruggen

MJ

Statistics

Publications

1

Citations

25

H-Index

1

Active since

2005

Affiliations

Delft University of Technology(Current)

M. J. van Bruggen is an author at Delft University of Technology specializing in chromatic aberration correction, electrical engineering, and electron sources.

Publications per year

2005–2005

1

Publications

1

Development of a multi-electron-beam source for sub-10nm electron beam induced deposition

M. J. van Bruggen, B. van Someren, P. Kruit · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 25 citations

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