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Stephane Sitbon

SS

1

Publications

52

Citations

1

H-Index

1995

Active since

Affiliations

Orange (France)(Current)

Stephane Sitbon is an author at Orange (France) specializing in optoelectronic devices, applied physics, and integrated circuits.

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Publications per year

1995–1995

1

Publications

1

Low temperature deposition of silicon nitride films by distributed electron cyclotron resonance plasma-enhanced chemical vapor deposition

Stephane Sitbon, M. C. Hugon, B. Agius et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 52 citations

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