3
Publications
53
Citations
3
H-Index
2000
Active since
Affiliations
Kazuhiko Mimoto is an author at The University of Osaka specializing in materials science, engineering, and surface science.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceChemical EngineeringMaterials EngineeringChemistryThin FilmsAtomic PhysicsElectrochemistry
Publications per year
2000–2000
3
3
Deposition of 3C-SiC films using ECR plasma of methylsilane
Takaomi Matsutani, Masato Kiuchi, Takae Takeuchi et al. · Vacuum · 2000 · 17 citations
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