Concepedia

J. Gstöttner

JG

Statistics

Publications

5

Citations

227

H-Index

5

Active since

2001

Affiliations

Technical University of Munich(Current)

Max Planck Institute for Plasma Physics

Max Planck Society

J. Gstöttner is an author at Technical University of Munich specializing in materials science, materials engineering, and natural sciences.

Publications per year

2001–2004

5

Publications

5

Scaling properties and electromigration resistance of sputtered Ag metallization lines

Matheus Hauder, J. Gstöttner, W. Hänsch et al. · Applied Physics Letters · 2001 · 118 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermal stability of titanium nitride diffusion barrier films for advanced silver interconnects

Liming Gao, J. Gstöttner, R. Emling et al. · Microelectronic Engineering · 2004 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +16

Electromigration resistance of sputtered silver lines using different patterning techniques

Matheus Hauder, W. Hänsch, J. Gstöttner et al. · Microelectronic Engineering · 2002 · 29 citations

Engineering, Electrical Engineering, Materials Science +14

Metalorganic chemical vapor deposition of silver thin films for future interconnects by direct liquid injection system

Liming Gao, Peter Härter, Ch. Linsmeier et al. · Materials Science in Semiconductor Processing · 2004 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

Chemical mechanical polishing of silver damascene structures

Matheus Hauder, J. Gstöttner, Liming Gao et al. · Microelectronic Engineering · 2002 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +11

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