Statistics
Publications
1
Citations
20
H-Index
1
Active since
2002
Affiliations
Daniel Goods is an author at Sandia National Laboratories California specializing in photoresists, natural sciences, and surface modification.
Publications per year
2002–2002
1
1
Photospeed considerations for extreme ultraviolet lithography resists
Paul M. Dentinger, Luke Hunter, Donna J. O’Connell et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +13
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