Concepedia

Toru Otsuka

TO

Statistics

Publications

8

Citations

187

H-Index

8

Active since

1995

Affiliations

ShinEtsu Chemical (Japan)(Current)

Hiroshima University

Toru Otsuka is an author at ShinEtsu Chemical (Japan) specializing in materials science, natural sciences, and silicon materials.

Publications per year

1995–2012

8

Publications

8

Chemical process of silicon epitaxial growth in a SiHCl3–H2 system

Hitoshi Habuka, Yasuaki Aoyama, S. Akiyama et al. · Journal of Crystal Growth · 1999 · 67 citations

Natural Sciences, Chemistry, Materials Science +14

Hydrogen dissociation on hot tantalum and tungsten filaments under diamond deposition conditions

Toru Otsuka, Manabu Ihara, Hiroshi Komiyama · Journal of Applied Physics · 1995 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +15

Reaction of Hydrogen Fluoride Gas at High Temperatures with Silicon Oxide Film and Silicon Surface

Hitoshi Habuka, Toru Otsuka · Japanese Journal of Applied Physics · 1998 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

In situ cleaning method for silicon surface using hydrogen fluoride gas and hydrogen chloride gas in a hydrogen ambient

Hitoshi Habuka, Toru Otsuka, Masatake Katayama · Journal of Crystal Growth · 1998 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

A Direct Approach for Evaluating the Thermal Condition of a Silicon Substrate under Infrared Rays and Specular Reflectors

Hitoshi Habuka, Toru Otsuka, Masanori Mayusumi et al. · Journal of The Electrochemical Society · 1999 · 13 citations

Engineering, Materials Engineering, Materials Science +17

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