1b:I[776749,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1c:I[303486,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1d:I[341892,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1e:I[617707,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 1f:I[866528,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 20:I[963176,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 21:I[987099,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 22:I[226200,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"Group"] 23:I[723365,["/_next/static/chunks/c97efd7440d9bd83.js","/_next/static/chunks/cade25408804e153.js","/_next/static/chunks/4b78a33ddbd7188c.js","/_next/static/chunks/da883ec1c2f0eed1.js","/_next/static/chunks/25ca49077b5926af.js","/_next/static/chunks/44ffa090c2b6b4f9.js","/_next/static/chunks/422ef944f0761271.js"],"default"] 24:T53a,In this letter, an enhancement-mode (E-mode) GaN p-channel field-effect transistors (p-FETs) with current density of −5.6 mA/mm and

${I} _{{\mathrm {ON}}}/{I} _{{\mathrm {OFF}}}$

ratio of 10 ⁶ was demonstrated on a p-GaN/AlN/AlGaN/GaN heterostructure on Si substrate. A decent ohmic contact resistivity of

$9.25 \times 10^{-5} \Omega \cdot {\mathrm {cm}}^{2}$

is achieved by capping the heterostructure with a 10-nm heavily Mg-doped p ⁺⁺ -GaN epilayer. A two-step gate trench etching process, is implemented to overcome the decreased OFF-state blocking voltage associated with the surface p

Zhongchen Ji

Publications