Statistics
Publications
1
Citations
30
H-Index
1
Active since
2002
Affiliations
Fibics (Canada)(Current)
Michael Megorden is an author at Fibics (Canada) specializing in materials engineering, etch mechanisms, and milling.
Publications per year
2002–2002
1
1
Copper device editing: Strategy for focused ion beam milling of copper
J. Casey, Michael W. Phaneuf, Clive Chandler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 30 citations
Natural Sciences, Materials Engineering, Materials Science +16
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